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SECS/GEM Overview and Standards

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Introduction: SECS/GEM is an international standard for semiconductor manufacturing equipment communication
Developed by SEMI.org, it enables standard communication between equipment and host systems
Widely adopted in photovoltaic and SMT industries
Standards Components: SEMI E30 GEM defines equipment behaviors and communication capabilities
SEMI E5 SECS-II specifies message interpretation between equipment and host
SEMI E37 HSMS provides TCP/IP-based transport layer for high-speed communication
Control Levels: Offline: Manual operation by operator at console
Online/Local: Read-only operations like data collection
Online/Remote: Full read-write operations through communications interface
Data Management: Status variables provide global, read-only data updates
Equipment constants allow read-write modifications
Data collection through status variables, equipment constants, and alarms
Message Structure: SECS-II messages consist of header and body sections
Header includes stream ID, function ID, and message direction
Message body contains detailed data item definitions
HSMS Protocol: Built on TCP/IP protocol for high-speed communication
Requires active/passive connection mode settings
Includes timeout parameters for various communication parameters